Highly sensitive and accurate analyzers for reliable measurement of HF, HCl and NH3.

Introduction

• The OA-ICOS™ industrial trace gas analyzer was designed to perform to the most demanding of our customers’ requirements with the highest sensitivity, accuracy, precision and response times. It is simple to use, starts up in minutes, requires no field calibration and has minimal preventative maintenance requirements. 

• These features make it ideal for:

  Airborne molecular contamination (AMC) monitoring for semiconductor FAB processes and personnel health and safety

  Front Opening Unified Pod (FOUP) and vapour deposition chamber monitoring

• Off-axis ICOS has many advantages over conventional cavity ring down spectroscopy techniques such as being far more robust and reliable, having a much shorter measurement time and field-serviceable cavity and mirrors.

• All ABB instruments include an internal computer (Linux OS) that stores the results and related metrics of each analysis on its internal hard drive for unattended long-term operation. Data can be exported continuously through analog, digital (RS232), and Modbus™1 outputs. Furthermore, the instruments may be controlled remotely via the Internet. This capability allows the opportunity to control, obtain data from, and diagnose the instrument without being on site. Complete spectra of the gases measured can also be saved for extended troubleshooting and even allowing remote optimisation of analyzers following unexpected process changes.

Features and benefits

• Available in single or multi-gas configurations of HF, HCI, NH₃

• Also reports accurate and precise H₂O measurements

• Standard 0 to 5 V and 4 to 20 mA analog outputs, and optional Modbus TCP

• Optimized data processing for best performance in measuring sub-ppb concentrations

• Touchscreen digital display for gas concentration and analyzer status

• Primary password protection for analyzer and data security

• Optimized zero-air performance for reliable confirmation of process events

• Customizable calibration and performance certification document packages available